JPH0543472Y2 - - Google Patents
Info
- Publication number
- JPH0543472Y2 JPH0543472Y2 JP8266288U JP8266288U JPH0543472Y2 JP H0543472 Y2 JPH0543472 Y2 JP H0543472Y2 JP 8266288 U JP8266288 U JP 8266288U JP 8266288 U JP8266288 U JP 8266288U JP H0543472 Y2 JPH0543472 Y2 JP H0543472Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter box
- spin dryer
- rotor
- ceiling plate
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000002655 kraft paper Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011120 plywood Substances 0.000 description 1
- 238000011176 pooling Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8266288U JPH0543472Y2 (en]) | 1988-06-22 | 1988-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8266288U JPH0543472Y2 (en]) | 1988-06-22 | 1988-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH024241U JPH024241U (en]) | 1990-01-11 |
| JPH0543472Y2 true JPH0543472Y2 (en]) | 1993-11-02 |
Family
ID=31307405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8266288U Expired - Lifetime JPH0543472Y2 (en]) | 1988-06-22 | 1988-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543472Y2 (en]) |
-
1988
- 1988-06-22 JP JP8266288U patent/JPH0543472Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH024241U (en]) | 1990-01-11 |
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